Optimized piranha etching process for SU8-based MEMS and MOEMS construction
نویسندگان
چکیده
منابع مشابه
Moems - Mems 2006 2006
Devices/Applications/Reliability 6111 Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V (Tanner/Ramesham) 6112 Microfluidics, BioMEMS, and Medical Microsystems IV (Papautsky/Wang/Vauchier) 6113 MEMS/MOEMS Components and Their Applications III (Olivier/Tadigadapa/Henning) 6114 MOEMS, Display, Imaging, and Miniaturized Microsystems IV (Ürey/Dickensheets/Gogoi) Founding Chair M...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2010
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/20/11/115008